| 摘要 |
PROBLEM TO BE SOLVED: To provide a flaw detecting device capable of preventing detection failure and excessive detection of faulty parts and improved in the rate of detecting faulty parts, and a faulty part detecting method using the flaw detecting device.SOLUTION: A magnetic particle faulty part detecting device 1 is equipped with an image pickup device 16 that picks up an image of a surface of a test sample 10 and a detecting device 30 that processes the original image picked up by the image pickup device 16 to detect any faulty part on the surface. The detecting device 30 is equipped with a first extractor 31 that binarizes the original image with a first threshold to extract a first faulty part candidate 40, a test area generator 32 that so generates a test area 41 as to contain the first faulty part candidate 40 therein, a second extractor 33 that binarizes the test area 41 with a second threshold to extract a second faulty part candidate 42, and a faulty part determining unit 34 that expands the second faulty part candidate 42 to detect a faulty part.SELECTED DRAWING: Figure 2 |
