| 摘要 |
PROBLEM TO BE SOLVED: To detect (calculate) the oscillation angle about a first axis and the oscillation angle about a second axis of a light reflection surface with the light reflection surface in an optical scanner actuator that scans light two-dimensionally being made to oscillate about the first axis and the second axis.SOLUTION: The evaluation device of an optical scanner actuator 1 includes: a light source section 2 for irradiating laser light onto the light reflection surface 15 of a galvanomirror 10 (optical scanner actuator); a drive section 3 for supplying a first sinusoidal wave signal and a second sinusoidal wave signal to the galvanomirror 10; a light position detection section 4 that has a light-receiving surface 4a and detects the incident position into the light-receiving surface 4a of scanner light by the galvanomirror 10; and a controller 5. The controller 5 calculates the oscillation angle about a x axis and the oscillation angle about a y axis of the light reflection surface 15 on the basis of the first injection position P(t) and the second injection position P(t+Δ t) into the light-receiving surface 4a of the scanner light, a difference in a detection time Δ t between the first injection position and the second injection position, and a distance L between the light reflection surface and the light-receiving surface 4a.SELECTED DRAWING: Figure 2 |
