PROCESS FOR FABRICATING A PIEZOELECTRIC NANOGENERATOR, PIEZOELECTRIC NANOGENERATOR OBTAINED BY THIS PROCESS AND DEVICE INCLUDING SUCH A PIEZOELECTRIC NANOGENERATOR

摘要

The invention relates to a process for fabricating a piezoelectric nanogenerator, to a piezoelectric nanogenerator obtained by this process and to a device including such a piezoelectric nanogenerator connected to a capacitor, said process comprising the following steps: a) providing a membrane (100) made of polarised β-PVDF or polarised P(VDF-TrFe) copolymer and therefore having piezoelectric properties, said membrane (100) moreover having two external major faces (11, 12) that are separated by a membrane thickness (e); b) irradiating the entirety of the thickness of said membrane (100), via at least one of its two external major faces (11, 12), with heavy ions having a fluence of between 103 ions/cm2 and 1010 ions/cm2, as a result of which a membrane (101) containing latent traces (TL) of the passage of the heavy ions through the entirety of its thickness is obtained; c) revealing the latent traces (TL) using a chemical process of length that is preset so as to preserve a defect zone (ZD) belonging to the latent trace, as a result of which a nanostructured membrane is obtained having nanopores including, around each nanopore, a defect zone (ZD); d) depositing a layer of an electrical conductor on one (12) of the two external major faces (11, 12) of said membrane; e) electrodepositing an electrical conductor or semiconductor in the nanopores, the electrodeposition being stopped before the nanopores have been completely filled, as a result of which a nanostructured membrane is obtained having nanowires (15) partially filling the nanopores; and f) depositing a layer, of an electrical conductor, on the other (11) of the two external major faces (11, 12) and which therefore does not make contact with the nanowires.