MICRO-ELECTRO-MECHANICAL SYSTEM DEVICES

摘要

In various embodiments, a micro-electro-mechanical system device is provided. The micro-electro-mechanical system device may include a carrier, a particle filter structure coupled to the carrier, the particle filter structure comprising a grid, wherein the grid comprises a plurality of grid elements, each grid element comprising at least one through hole, and a micro-electro-mechanical system structure disposed on a side of the particle filter structure opposite the carrier. A height of the plurality of grid elements is greater than a width of the corresponding grid elements.

主权项

1. A micro-electro-mechanical system device, comprising:
a carrier having a front side and a rear side opposite the front side, the carrier comprising a cavity; a particle filter structure coupled to the carrier and disposed in the cavity between the front side and the rear side of the carrier, the particle filter structure comprising a grid, wherein the grid comprises a plurality of grid elements, each grid element comprising at least one through hole; and a micro-electro-mechanical system structure disposed on the front side of the carrier, wherein a side of the micro-electro-mechanical system structure facing the carrier is at least partially exposed by the cavity; wherein a height of the plurality of grid elements is greater than a width of the corresponding grid elements.