发明名称 |
Methods for Manufacturing Semiconductor Devices |
摘要 |
A method for forming a semiconductor device includes providing a semiconductor substrate having an upper side and comprising, in a vertical cross-section substantially orthogonal to the upper side, a plurality of semiconductor mesas of a first monocrystalline semiconductor material which are spaced apart from each other by sacrificial layers selectively etchable with respect to the first monocrystalline semiconductor material and arranged in trenches extending from the upper side into the semiconductor substrate, forming on the semiconductor mesas a support structure mechanically connecting the semiconductor mesas, at least partly replacing the sacrificial layers while the semiconductor mesas remain mechanically connected via the support structure, and at least partly removing the support structure. |
申请公布号 |
US2016343577(A1) |
申请公布日期 |
2016.11.24 |
申请号 |
US201615229632 |
申请日期 |
2016.08.05 |
申请人 |
Infineon Technologies Dresden GmbH |
发明人 |
Sorschag Kurt;Sarlette Daniel;Braun Felix;Heller Marcel;Kaiser Dieter;Meusel Ingo;Lemke Marko;Mauder Anton;Strack Helmut |
分类号 |
H01L21/306;H01L21/02;H01L29/06;H01L29/78 |
主分类号 |
H01L21/306 |
代理机构 |
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代理人 |
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主权项 |
1. A method for forming a semiconductor device, the method comprising:
providing a semiconductor substrate having an upper side and comprising, in a vertical cross-section substantially orthogonal to the upper side, a plurality of semiconductor mesas of a first monocrystalline semiconductor material which are spaced apart from each other by sacrificial layers selectively etchable with respect to the first monocrystalline semiconductor material and arranged in trenches extending from the upper side into the semiconductor substrate; forming on the semiconductor mesas a support structure mechanically connecting the semiconductor mesas; at least partly replacing the sacrificial layers while the semiconductor mesas remain mechanically connected via the support structure; and at least partly removing the support structure. |
地址 |
Dresden DE |