| 发明名称 |
OXIDE SINTERED BODY, METHOD FOR PRODUCING SAME AND SPUTTERING TARGET |
| 摘要 |
An oxide sintered body comprising a bixbyite phase composed of In2O3 and an A3B5O12 phase (wherein A is one or more elements selected from the group consisting of Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu, and B is one or more elements selected from the group consisting of Al and Ga). |
| 申请公布号 |
US2016343554(A1) |
申请公布日期 |
2016.11.24 |
| 申请号 |
US201415107993 |
申请日期 |
2014.12.18 |
| 申请人 |
IDEMITSU KOSAN CO., LTD. |
发明人 |
TOMAI Shigekazu;INOUE Kazuyoshi;EBATA Kazuaki;SHIBATA Masatoshi;UTSUNO Futoshi;TSURUMA Yuki;ISHIHARA Yu |
| 分类号 |
H01J37/34;C23C14/34;H01L29/786;C23C14/08;C04B35/01;C04B35/64 |
主分类号 |
H01J37/34 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An oxide sintered body comprising a bixbyite phase composed of In2O3 and an A3B5O12 phase (wherein A is one or more elements selected from the group consisting of Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu, and B is one or more elements selected from the group consisting of Al and Ga). |
| 地址 |
Tokyo JP |
