ULTRAVIOLET IRRADIATION APPARATUS

摘要

An ultraviolet irradiation apparatus includes: a first substrate; a second substrate; electrodes disposed directly or indirectly on the first substrate; a dielectric layer covering the electrodes; a sealant joining together the first and second substrates; a light-emitting layer that is disposed directly or indirectly on the dielectric layer and/or a surface of the second substrate; and a reaction vessel disposed directly or indirectly on a surface of the second substrate. The reaction vessel includes a tubular structure, an inlet channel and an outlet channel. The tubular structure has a ratio ha/hc of 5 to 10, where ha is a diameter of a circle inscribed in an inner bottom surface of the tubular structure, and hc is an inner height of the tubular structure.

主权项

1. An ultraviolet irradiation apparatus comprising:
a first substrate having a main surface; a second substrate facing the main surface of the first substrate and comprising a material that transmits ultraviolet light; electrodes disposed directly or indirectly on the main surface of the first substrate; a dielectric layer covering the electrodes; a sealant joining together the first and second substrates to form a sealed discharge space between the first and second substrates; a light-emitting layer that is disposed directly or indirectly on the dielectric layer and/or a surface of the second substrate facing the discharge space and that receives excitation light generated in the discharge space and emits ultraviolet light; and a reaction vessel disposed directly or indirectly on a surface of the second substrate facing away from the discharge space, the reaction vessel comprising a tubular structure, an inlet channel that directs a fluid flowing from outside the reaction vessel into the tubular structure, and an outlet channel that directs the fluid flowing from inside the tubular structure out of the reaction vessel, the tubular structure having a ratio ha/hc of 5 to 10, wherein ha is a diameter of a circle inscribed in an inner bottom surface of the tubular structure, and hc is an inner height of the tubular structure.