发明名称 配線基板、配線基板の製造方法及び半導体装置の製造方法
摘要 A wiring substrate includes an adhesive layer, a wiring layer, and a support substrate. The adhesive layer includes a first surface and a second surface that is opposite to the first surface. The wiring layer is formed on the first surface of the adhesive layer. The support substrate is formed on the second surface of the adhesive layer. The wiring layer is partially exposed in a through hole extending through the adhesive layer and the support substrate in a thicknesswise direction. The support substrate is adhered to the adhesive layer in a removable manner.
申请公布号 JP6029873(B2) 申请公布日期 2016.11.24
申请号 JP20120147389 申请日期 2012.06.29
申请人 新光電気工業株式会社 发明人 中村 敦;今井 三喜
分类号 H01L23/12 主分类号 H01L23/12
代理机构 代理人
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