| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology for satisfactorily linking contour lines acquired from a plurality of SEM images by expanding/shrinking coordinate data of the contour lines while maintaining the shapes of the contour lines by using geometric computation.SOLUTION: An image processor of this invention includes a storage part 707 for storing a plurality of pieces of contour coordinate data obtained from pattern-shaped SEM images to be inspected or measured, a movement part 709 for adding the position information of a viewing field in which the SEM images are imaged to each of the plurality of pieces of contour coordinate data, a correction part 711 for correcting deviation between the plurality of pieces of contour coordinate data with the position information added thereto, and an integration part 713 for integrating the plurality of pieces of contour coordinate data corrected by the correction part 711 to one piece of wide viewing field contour coordinate data. |
