VIEW PORT FOR OBSERVING INGOT GROWTH PROCESS AND INGOT GROWTH APPARATUS INCLUDING SAME

摘要

A view port for observing ingot growth process of the present embodiment is as a view port for observing the inside of a chamber providing a space in which a growth process of an ingot is performed includes a body part disposed on the a side of the chamber and having a hole connected to the inside of the chamber; a window being inserted into the hole of the body part to maintain a sealing state of the chamber and through which light being transmitted from the inside of the chamber; and, a window purge being disposed on the side of the body part an forms air curtain. The view port of the present invention proposed has an advantage of prevention of the glass contamination as well as self-cleaning of the contaminated glass of the view port. The ingot that grows in the inside of the chamber may be clearly observed through such a view port and then the process condition is determined through the process data accurately observed. Therefore, there is an advantage that is capable of producing the high quality of the ingot.