发明名称 ACTIVE, IN-SITU, CALIBRATION OF MEMS ACCELEROMETERS USING OPTICAL FORCES
摘要 An accelerometer device configured for in-situ calibration applies a laser-induced pushing force at a first magnitude to a proof mass of an accelerometer, and while applying the laser-induced pushing force at the first magnitude to the proof mass, the device obtains a first output from the accelerometer. The device is further configured to apply a laser-induced pushing force at a second magnitude to the proof mass, and while applying the laser-induced pushing force at the second magnitude to the proof mass, the device obtains a second output from the accelerometer. Based on the first output and the second output, the device determines a scale factor for the accelerometer. The device is configured to determine a third output for the accelerometer, and based on the scale factor and the third output, determine an acceleration value.
申请公布号 EP3093670(A1) 申请公布日期 2016.11.16
申请号 EP20160167986 申请日期 2016.05.02
申请人 HONEYWELL INTERNATIONAL INC. 发明人 FERTIG, CHAD;TIN, STEVEN
分类号 G01P21/00 主分类号 G01P21/00
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