| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating material and a pellicle which can suppress damage at the time of handling to prevent dust and have resistance to abrasion, in order to improve inspectability.SOLUTION: A coating material is used to coat a pellicle frame 2 that stretches and supports a pellicle film 3 covering an opening 5, and includes synthetic resin and an inorganic powder agent. |
