| 摘要 |
A contour shape measurement method that can more accurately align an article to be measured to a predetermined position to enable high-precision evaluation even in a state where a probe measurement axis and a table rotation axis do not match with sufficient precision is provided. A spatial position of the table rotation axis relative to the probe measurement axis is obtained as a rotation axis vector. Alignment data obtained in at least two directions is coordinate-transformed around the rotation axis vector, to constitute synthesized alignment data. The article is aligned based on the synthesized alignment data. Since three-dimensional data of a surface to be measured of the article can be calculated, the article can be directly aligned to the probe measurement axis. Claimed is a contour shape measurement method for measuring a contour shape of a surface to be measured, by moving a probe along the surface in a probe scan direction (A4) to obtain measurement data of the surface, the contour shape measurement method comprising: obtaining a spatial position of an axis (A3) for rotating the surface with respect to the probe (10), as a rotation axis vector relative to the probe measurement axis (A1); obtaining sets of alignment data which are the measurement data of the surface in at least two different alignment directions; coordinate-transforming each set of alignment data around the rotation axis vector by a directional difference between a measurement direction and the corresponding alignment direction, and merging the coordinate-transformed sets of alignment data to constitute merged alignment data; calculating a spatial position of the merged alignment data, by fitting the merged alignment data to a function corresponding to a design shape of the surface or shape generated by changing the design shape; calculating a difference between a spatial position of the surface where a line intended to be measured is matched with the probe scan axis and the spatial positionof the merged alignment data, as a setting error; moving an object to be measured, to a spatial position that reduces the setting error; and obtaining the measurement data of the surface after moving the object. |
