发明名称 FILM AND METHOD FOR PREPARING THE SAME
摘要 A film and a method for preparing the film are provided. A substrate is provided, and a film is formed on at least a part of a surface of the substrate by magnetron sputtering a target under a protective gas and a reactive gas. The target includes polytetrafluoroethylene and magnesium fluoride, and the reactive gas includes at least one selected from a group consisting of CF4 and SiF4.
申请公布号 EP2935644(A4) 申请公布日期 2016.11.16
申请号 EP20130866340 申请日期 2013.12.11
申请人 BYD COMPANY LIMITED 发明人 ZHOU, WEI;SUN, YONGLIANG
分类号 C23C14/35;C23C14/06 主分类号 C23C14/35
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