| 摘要 |
PROBLEM TO BE SOLVED: To achieve the uniform longitudinal distribution of the compression stress applied to a mesa step and improve the trade-off relationship between the reliability and sensitivity of a force detection element.SOLUTION: A mesa step 13 extends along longitudinal direction between a first end 13a and a second end 13b connected to a peripheral part 15 of grooves 12a, 12b. When measured in width direction orthogonal to longitudinal direction, a distance between an intermediate part 13c of the mesa step 13 and the peripheral part 15 is shorter than a distance between the ends 13a, 13b of the mesa step 13 and the peripheral part 15. |
