| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring apparatus and a shape measuring method capable of highly accurately measuring a surface shape of an object to be measured.SOLUTION: Received light intensity distributions of an interference system and a confocal system are obtained in an irradiation direction of light about a plurality of portions of a surface of an object S to be measured. Interference height data are respectively calculated for the plurality of portions on the basis of the received light intensity distribution of the interference system. Confocal height data are respectively calculated for the plurality of portions on the basis of the received light intensity distribution of the confocal system. It is determined whether the interference height data have predetermined accuracy for each of the plurality of portions or not. If the interference height data have the predetermined accuracy, the interference height data is selected. If the interference height data do not have the predetermined accuracy, the confocal height data is selected. Shape data indicating a surface shape of the object S to be measured are generated using the interference height data or the confocal height data selected for the plurality of portions. |
