发明名称 サファイア基板及びその製造方法並びに窒化物半導体発光素子
摘要 [Technical Problem] A sapphire substrate and a method for manufacturing the same are provided, which enables growth of a nitride semiconductor having excellent crystallinity and can achieve a nitride semiconductor light emitting element having excellent light extraction efficiency. [Solution to Problem] A sapphire substrate provided with a plurality of projections on a principal surface on which a nitride semiconductor is grown to form a nitride semiconductor light emitting element, wherein the projection is substantially pyramidal-shaped having a pointed top and constituted by a plurality of side surfaces, wherein the side surface has an inclined angle of between 53° and 59° from a bottom surface of the projection, and wherein the side surface is crystal-growth-suppressed surface on which growth of nitride semiconductor is suppressed relative to the substrate surface located between the adjacent projections.
申请公布号 JP6024533(B2) 申请公布日期 2016.11.16
申请号 JP20130049919 申请日期 2013.03.13
申请人 日亜化学工業株式会社 发明人 佐幸 直也;小原 崇;井上 芳樹;渋谷 裕樹;河内 良仁;武市 和之;長浜 靖典
分类号 H01L33/22;H01L33/32 主分类号 H01L33/22
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