A NANO-MULTILAYER FILM

摘要

A nano-multilayer film is shown. The substrate (200) has a transition layer (210) formed on it, which has a pure titanium film directly on the substrate and then a mixed layer of titanium carbide and quasi-graphite on the titanium film. A composite layer (212) is formed on top of the transition layer, and is a multilayer structure with alternately laminated quasi-graphite layers (212a) that also includes titanium, and diamond-like carbon layers (212b), where the sp 2 content in the quasi-graphite layer is 60 % and the sp 3 content in the diamond-like carbon layer is 70 %. In the direction from the substrate to the diamond-like carbon top-layer film, the mass percentage of Ti in the mixed layer of titanium carbide and quasi-graphite is gradually decreased, while the mass percentage of C is gradually increased. A diamond-like carbon top-layer film (214) is provided on the composite layer.