发明名称 電子顕微鏡観察用試料台、並びに試料の断面観察方法
摘要 PROBLEM TO BE SOLVED: To provide a method which allows for accurate cross-section observation, by preventing decomposition of a sample which is decomposed easily when exposed to the atmosphere.SOLUTION: A sample table 10 for electron microscope used for cross-section observation of a sample subjected to cross-section processing includes a sample table body 11 having a recess 13 of predetermined depth in an upper surface 11a of the body trunk, and at least one through hole 14 formed in a trunk side face 11b to penetrate from the side face 11b to the recess 13, and a fixing member 12 being inserted into the through hole 14. In the sample table 10 for electron microscope, a sample table for cross-section processing that is mounting a sample subjected to cross-section processing is mounted in the recess 13 of the sample table body 11, and attached while being fixed by the fixing member 12 penetrated the through hole 14.
申请公布号 JP6024485(B2) 申请公布日期 2016.11.16
申请号 JP20130014142 申请日期 2013.01.29
申请人 住友金属鉱山株式会社 发明人 林 徹太郎
分类号 H01J37/20;G01N1/28;G01N1/32;G01N23/225 主分类号 H01J37/20
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