发明名称 EXTERNAL PLASMA SYSTEM
摘要 Methods and systems for generating a plasma using an external plasma system are described. The plasma system may include an energy coupling device (e.g., an electromagnetic coil or capacitor) that is submersed within a liquid coolant and powered by an RF source. In some embodiments, a C-shaped magnetic core may be submersed within the liquid coolant and one or more plasma tubes may be arranged within an opening of the C-shaped magnetic core between the ends of the C-shaped magnetic core. To generate a plasma in a first tube of the one or more plasma tubes, a gas may be inserted into the first tube while the RF source drives a coil surrounding a portion of the C-shaped magnetic core to couple electromagnetic energy into the gas within the first tube.
申请公布号 WO2016179032(A1) 申请公布日期 2016.11.10
申请号 WO2016US30235 申请日期 2016.04.29
申请人 VRANICH, Michael N.;SMITH, Paul Frederick 发明人 VRANICH, Michael N.;SMITH, Paul Frederick
分类号 H01J37/32;H05H1/46 主分类号 H01J37/32
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