| 摘要 |
PROBLEM TO BE SOLVED: To control an opening with high accuracy.SOLUTION: A flow control valve (rotary valve) 8 is provided with a valve opening set value correcting section 20C and a correction table storage section 20D. In the correction table storage section 20D, a correction table TA indicating a valve opening correction value α corresponding to combination of an opening of a valve element 14 and fore-and-aft differential pressure of the valve element 14 is stored. In the valve opening set value correcting section 20C, a correction value acquiring section 20C2 acquires the valve opening correction value α corresponding to an actual opening θpv of the valve element 14 and the fore-and-aft differential pressure ΔP from the correction table TA, and transmits the same to the set value correcting section 20C1 as the correction value α under consideration of a torsion amount of a valve shaft 15. The set value correcting section 20C1 corrects a valve opening set value θsp by the correction value α under consideration of the torsion amount of the valve shaft 15, and transmits the same to the valve opening control section 20A as a corrected valve opening set value θsp'.SELECTED DRAWING: Figure 2 |
