| 摘要 |
PROBLEM TO BE SOLVED: To reduce or prevent a leak of gas from joint surfaces of plate-like members that constitute a slider in a static pressure gas bearing to be used under a vacuum environment.SOLUTION: A static pressure gas bearing to be used under a vacuum environment comprises: a guide shaft; and a cylindrical slider 20 that can move in an axial direction while housing the guide shaft. The slider 20 is configured by fastening a plurality of plate-like members 20A-20D. Films 24 made of a soft material having a smaller elastic modulus than that of the plate-like members are interposed between joint surfaces of the plate-like members.SELECTED DRAWING: Figure 2 |
