发明名称 MICROETCHING AGENT FOR COPPER, SUPPLEMENTARY LIQUID FOR SAME, AND MANUFACTURING METHOD FOR CIRCUIT BOARD
摘要 Disclosed is a microetching solution, a replenishment solution added to said microetching solution and a method for production of a wiring board using said microetching solution. The microetching solution for copper consists of an aqueous solution containing a cupric ion, an organic acid, a halide ion, a polymer and a nonionic surfactant. The polymer is a water-soluble polymer including a polyamine chain and/ or a cationic group and having a weight average molecular weight of 1000 or more. In the microetching solution of the present invention, a value of A/B is 2000 to 9000 and a value of A/D is 500 to 9000, where a concentration of the halide ion is A% by weight, a concentration of the polymer is B% by weight and a concentration of the nonionic surfactant is D% by weight. Using this microetching solution, adhesion to a resin or the like can be uniformly maintained even with a low etching amount.
申请公布号 EP2878706(B1) 申请公布日期 2016.11.09
申请号 EP20130804745 申请日期 2013.06.25
申请人 MEC COMPANY LTD. 发明人 KURII, MASAYO;TAI, KIYOTO;NAKAMURA, MAMI;OGINO, YUKI
分类号 C23F1/18;H01L21/308;H05K3/38 主分类号 C23F1/18
代理机构 代理人
主权项
地址