发明名称 サファイア材料の洗浄方法
摘要 PROBLEM TO BE SOLVED: To provide a sapphire material-cleaning method allowing simple and effective cleaning of a sapphire material with gas-dissolving water obtained by dissolving a low-cost and safe gas.SOLUTION: In a cleaning method where a sapphire material is cleaned by contacting the sapphire material with a cleaning liquid, the cleaning liquid is nitrogen gas-dissolving water and a supersonic wave is applied in cleaning. The pH of the nitrogen gas-dissolving water is preferably greater than 7. The concentration of the nitrogen gas in the nitrogen gas-dissolving water is preferably 8 mg/L to 20 mg/L. After alkaline cleaning of the sapphire material, it is preferable to clean with the nitrogen gas-dissolving water.
申请公布号 JP6024216(B2) 申请公布日期 2016.11.09
申请号 JP20120124762 申请日期 2012.05.31
申请人 栗田工業株式会社 发明人 正岡 融;井田 純一
分类号 H01L21/304 主分类号 H01L21/304
代理机构 代理人
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