| 摘要 |
A laser processing apparatus including a laser beam branching mechanism provided between a laser oscillator and a focusing unit. The laser beam branching mechanism includes a spread angle adjusting unit for adjusting the spread angle of a laser beam and a branching unit for branching the laser beam into a plurality of laser beams. The branching unit includes a half-wave plate, a first polarization beam splitter for separating the laser beam into P polarized light and S polarized light, a first mirror for reflecting the P polarized light, a second mirror for reflecting the S polarized light, and a second polarization beam splitter for leading the P polarized light reflected by the first mirror and the S polarized light reflected by the second mirror to different optical paths extending in the same direction. |
