| 摘要 |
A hard X-ray photoelectron spectroscopy apparatus provides separate source and analysis vacuum chambers to reduce the size of the apparatus, and comprises an X-ray source, an analyzer 6, sample manipulator 2, an analysis chamber 14, and vacuum evacuation systems; wherein a plate-like sample 5 is arranged to be rotatable around one axis by said manipulator; wherein said source comprises an electron gun 3b, a target 7 irradiated with the electrons to generate X-rays 103, monochromator crystal assembly 9 to monochromatise the X-rays and extract characteristic X-rays 105 only, said monochromator has a toroidal surface, and a vacuum vessel for installing these components; wherein the monochromator is located on the Rowland circle with said target and said sample such that the dispersed X-ray beam 105 concentrates on the sample surface 7 with minimum aberration; wherein said Rowland circle is located to be orthogonal to the surface of the sample; wherein an optical axis of said analyzer 6 is placed to be substantially perpendicular to the incident direction of the X-rays 105; wherein the sample is located such that said X-rays are obliquely incident on the surface of said sample. |
