| 摘要 |
PROBLEM TO BE SOLVED: To measure minor components adhered to a metal surface with high sensitivity, and to lower laser energy to further measure the minor components to low concentration with high accuracy when the minor components are measured by double pulses by a coaxial irradiation type LIBS.SOLUTION: In a concentration measurement method of metal surface adhesion components for identifying and calculating concentration of minor components adhered to a metal surface by performing ablation of adhered materials by irradiating a metal surface 6 which is an inspection object with pulse-like laser beams, after that, measuring light emission from the materials made into plasma by the ablation, and performing spectroscopy, the surface of a target 6 is sequentially irradiated with a first laser beam 11 with laser energy of 1 mJ or more and 100 mJ or less, and a second laser beam 12 with laser energy of 15 mJ or more and 100 mJ or less by coaxial irradiation. |
