| 摘要 |
PROBLEM TO BE SOLVED: To provide a filtering method capable of suppressing generation of particles.SOLUTION: A filtering method includes a first step for supplying an organic chemical, containing an organic solent as a main solvent, to a filter device F having a filter body internally, a second step for discharging the organic chemical, accumulated in the filter device F, following to the first step, and a third step for supplying an aqueous chemical, containing water as the main solvent, to the filter device F before the filter body is dried after the second step. |
