发明名称 EUVリソグラフィ用のミラーの基板
摘要 The substrate (1) comprises a base body (2) which is an alloy system that is made of an intermetallic phase having a crystalline component. The intermetallic phase has a bravais lattice in the crystalline form, where the alloy system is provided as a binary aluminum-copper system, and the alloy is provided with a substitution grating. The alloy is provided as a copper alloy or aluminum alloy. The particle composite material comprises ceramic matrix having silicon matrix or carbon matrix with silicon carbide dispersoids. An independent claim is also included for a mirror with highly reflective layer.
申请公布号 JP6023083(B2) 申请公布日期 2016.11.09
申请号 JP20130549778 申请日期 2012.01.14
申请人 カール・ツァイス・エスエムティー・ゲーエムベーハー 发明人 クラウディア エクスタイン;ホルガー マルトア
分类号 G03F7/20 主分类号 G03F7/20
代理机构 代理人
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