| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for drilling a substrate which can prevent drilling with a wrong position as a reference when chips and/or dust adheres to the surface of a drill or a substrate.SOLUTION: A substrate drilling apparatus causes a substrate pressing part 3 to descend and press a substrate 1 mounted on a table and then causes a drill 4 to descend and carry out drilling a blind hole continuously and comprises first detection means 10 of detecting, each time drilling is carried out, a position at which the substrate pressing part 3 comes in contact with the substrate 1 by being descended, second detection means 11 of detecting, each time drilling is carried out, a position at which the tip of the drill 4 comes in contact with the substrate 1 by the drill 4 being descended and control means 9 of comparing a difference between the positions detected by the first and second detection means 10 and 11 with a difference between preceding hole positions and, when the comparison result is within a predetermined range, after a detection operation of the second means 11, controlling so as to drilling a hole to a depth with the position detected by the second detection means 11 as reference . |
