METHOD AND SYSTEM FOR ANALYSING PARTICLES IN COLD PLASMA

摘要

The invention relates to a method of analyzing particles, in particular particles of diameter less than 1 μm, the method comprising the following steps: firing laser shots into a cold plasma (45) at low pressure; using an optical spectrometer device (60) to acquire emission spectra of the light emitted by the plasma as a result of the laser shots, in such a manner that for each acquired spectrum, an acquisition period begins no later than 100 ns after firing the laser shot; and analyzing the particles present in the plasma on the basis of the emission spectra. A system for detecting and/or analyzing particles by performing the method.