| 摘要 |
A thermal position sensor includes a collection of micro-bolometers, each having an electrical resistance and each including a substrate and an absorptive element. The absorptive element is suspended above the substrate and configured to absorb infrared radiation, including 10-micron long-wavelength infrared radiation. A change in a temperature of the micro-bolometer causes a change in the resistance of the micro-bolometer. The collection of micro-bolometers is partitioned into a first quadrant, a second quadrant, a third quadrant, and a fourth quadrant, where each of the quadrants represents a 90-degree segment of the sensor and includes at least one micro-bolometer of the collection of micro-bolometers. Each of the quadrants includes at least one output signal that provides information indicative of a temperature of the quadrant based on a resistance associated with the at least one micro-bolometer of the quadrant. |
