METHOD FOR MANUFACTURING POWER-MODULE SUBSTRATE

摘要

A method for manufacturing a power module substrate includes a first lamination step of laminating a ceramic substrate (11) and a copper sheet (22) through an active metal material (26) and a filler metal (25) having a melting point of 660°C or lower on one surface side of the ceramic substrate (11); a second lamination step of laminating the ceramic substrate (11) and an aluminum sheet (23) through a bonding material (27) on the other surface side of the ceramic substrate (11); and a heating treatment step of heating the ceramic substrate (11), the copper sheet (22), and the aluminum sheet (23) laminated together, and the ceramic substrate (11) and the copper sheet (22), and the ceramic sheet (11) and the aluminum sheet (23) are bonded at the same time.