发明名称 UNIFORM CHEMICAL VAPOR DEPOSITION COATING ON A 3-DIMENSIONAL ARRAY OF UNIFORMLY SHAPED ARTICLES
摘要 The present invention is a method of coating uniformly shaped and sized articles. The method includes providing a reactor having an arrayed inner surface, positioning the articles within the reactor, and coating the articles.
申请公布号 EP3087585(A1) 申请公布日期 2016.11.02
申请号 EP20140874194 申请日期 2014.12.16
申请人 3M INNOVATIVE PROPERTIES COMPANY 发明人 OUDERKIRK, ANDREW J.;POWERS, MAX;GABRIEL, NICHOLAS T.;DODGE, BILL H.;MCDOWELL, ERIN A.;KIESCHKE, ROBERT R.;JESUDOSS, AROKIARAJ
分类号 H01L21/205;H01L21/56;H01L33/00 主分类号 H01L21/205
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