发明名称 |
VACUUM PLASMA GENERATOR |
摘要 |
A vacuum plasma generator with an output for feeding a plasma discharge for treatment of workpieces in a vacuum chamber has a connection for the junction to AC voltage mains, a rectifier connected to a converter with a control input for the setting and/or regulation of the converter output voltage, and a controlled full bridge circuit connected to the converter output with a potential-free generator output, which transposes the converter output voltage into pulses of 1 to 500 kHz. A potential-isolating transformer is switched into the bridge for the galvanic decoupling of the generator output. |
申请公布号 |
EP1488444(B1) |
申请公布日期 |
2016.11.02 |
申请号 |
EP20030701433 |
申请日期 |
2003.02.19 |
申请人 |
OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON |
发明人 |
TUYMER, GERHARD;SCHÜTZE, ANDREAS |
分类号 |
H01J37/34;H05H1/24;C23C14/34;C23C26/00;H01J37/32;H03K17/56;H05H1/46 |
主分类号 |
H01J37/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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