| 摘要 |
A scanner and method for using the same are disclosed. The scanner includes a stage, a MIR light source, an imaging system, and a controller. The stage is adapted to hold a specimen to be imaged and to move the specimen in a first direction and in a second direction that is orthogonal to the lateral direction. The imaging system forms an image plane of the specimen when the stage is positioned at a second direction distance, z, from a known point in the imaging system. The imaging system forms a plurality of different image planes of the specimen at the illumination wavelength. Each of the plurality of image planes is characterized by a different value of z, the controller determining a value of z for each of a plurality of points on the specimen at which the point on the specimen is in focus. |
