ENERGY RAY DETECTOR

摘要

A thin, lightweight, and highly reliable energy ray detector that enables high-speed reading is provided. An energy ray detector (1) includes TFTs (20) that are arranged in a grid pattern and that each have an active layer formed of a semiconductor having an electrical property changing in accordance with the amount of applied energy ray radiation, and a property detection circuit unit (5) and a controller (60) that detect information regarding the energy ray radiation from changes in the electrical property of the TFTs (20).

主权项

1. An energy ray detector comprising:
semiconductors elements that are arranged in a grid pattern, each semiconductor element among the semiconductor elements having an active layer formed of an oxide semiconductor, the active layer having a property changing in accordance with an amount of applied energy ray radiation; and a detection unit that, from a relationship between a rate of increase in an electric current flowing through the semiconductor element due to the changing property of the active layer and the amount of energy ray radiation, determines amounts of energy ray radiation corresponding to rates of increase in electric currents flowing through the semiconductor elements by performing calculation.