| 摘要 |
The invention relates to a valve device (1) for connecting a vacuum pump (5) to a vacuum pipework (4) of a clean room having an inlet connector (2) and an outlet connector (3), and to a method for operating the valve device, wherein a main connection (6) is configured between the inlet connector (2) and the outlet connector (3), in which main connection (6) a main valve (7) is arranged. A bypass connection (8) is configured parallel to the main valve (7), in which bypass connection (8) a first auxiliary valve (10) is arranged. In order for it to be possible to monitor functioning of the vacuum pump in as simple a manner as possible, a measuring point (12) is configured in the bypass connection (8) downstream of the first auxiliary valve (10) in the flow direction. |
