发明名称 WEB BASED CHEMICAL BATH DEPOSITION APPARATUS
摘要 Methods and systems for forming a layer from a fluid mixture on a web are provided. The system includes a fluid delivery apparatus for delivering the fluid mixture onto the web. The fluid delivery apparatus includes a cascade device and a chemical dispenser device. The system also includes a fluid stirring apparatus comprising at least one fan positioned over the web and configured to generate a flow pattern that stirs the fluid mixture on the web while the layer is being formed, without the at least one fan contacting the fluid mixture. The system further includes a fluid removal apparatus having a rinsing device and a suction device. The rinsing device is configured to dispense a rinsing fluid onto the web. The suction device is configured to remove by suction the rinsing fluid and a remaining portion of the fluid mixture remaining on the web after formation of the layer.
申请公布号 EP3084038(A1) 申请公布日期 2016.10.26
申请号 EP20140833559 申请日期 2014.12.19
申请人 NUVOSUN, INC. 发明人 HACHTMANN, BRUCE;CLOVER, PRESTON;HOLLARS, DENNIS;WALL, ARTHUR, C.;TAYLOR, ROCKY;PENG, GANG, GRANT
分类号 C23C18/12;H01L31/0392;H01L31/18 主分类号 C23C18/12
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