| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method for objectively and efficiently inspecting a body to be inspected.SOLUTION: An imaging unit images an inspection image Q displayed on a sample to acquire a captured image P (step S31). An image processing unit determines histogram information IH and difference information &Dgr;I on the basis of the captured image P (step S32). A determination unit 30 generates a feature vector XS on the basis of parameters included in the histogram information IH and the difference information &Dgr;I (step S33). The determination unit 30 calculates a Mahalanobis squared distance between the feature vector XS and an average vector AVE, on the basis of the feature vector XS determined in the step S33, the average vector AVE determined in statistic data calculation processing and a covariance inverse matrix R (step S34). The quality of a body to be inspected is determined on the basis of the Mahalanobis squared distance. |
