| 摘要 |
The purpose of the present invention is to provide a pellicle which has, on the inner surface of the pellicle frame, a pressure-sensitive adhesive layer that has holding performance capable of satisfactorily adhering suspended substances including dust thereto and that has excellent resistance to short-wavelength light. This pellicle comprises a pellicle frame, a pellicle film stretched over the pellicle frame, and a pressure-sensitive adhesive layer disposed inside the pellicle frame, wherein the pressure-sensitive adhesive layer comprises a copolymer having structural units represented by formula (1) and structural units represented by formula (2), the amount of the copolymer being 60 mass% or more of the pressure-sensitive adhesive layer.
€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ-CH 2 CF 2 -€ƒ€ƒ€ƒ€ƒ€ƒ(1)
€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ-CF 2 CF(CF 3 )-€ƒ€ƒ€ƒ€ƒ€ƒ(2) |
