| 摘要 |
A pressure sensor (10) comprising: a detection film (200) which is arranged on a silicon substrate (100) and is used for detecting a pressure which is applied to the surface of the detection film and generating a bulge deformation which adapts to the size of the pressure; an optical transmitter (300) and an optical detector (400) which are arranged on the silicon substrate (100), are located on a plane which is parallel to a plane where the detection film (200) is located, and are oppositely arranged at two sides of the detection film (200); and a pressure calculation module which is connected to the optical detector (400) and is used for acquiring detected light intensity data, and calculating a pressure value according to the light intensity data. |
