| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor pressure sensor that can measure pressure in the outside of a cap using a pressure sensitive element arranged in the cap without forming a through hole in the cap.SOLUTION: A semiconductor pressure sensor 1 comprises: a pressure sensitive element 10 detecting an ambient pressure; a substrate 20 on which the pressure sensitive element 10 is mounted and in which a groove 21 is formed; and a cap 30 covering the pressure sensitive element 10 on the substrate 20. The semiconductor pressure sensor 1 is further provided with, between the substrate 20 and the cap 30, a junction 41 bonding one part of the edge of the cap 30 and the substrate 20, and a non-junction 42 bringing the other part of the edge of the cap 30 and the substrate 20 into a non-bonding state. The groove 21 is opposed to the edge of the cap 30 on the non-junction 42. |
