| 摘要 |
An apparatus (1) for the optical measurement of the topography of a sample (2) comprises an illumination device (3) for illuminating a sample that is to be measured, an optical system (5) with a limited depth of focus for taking photographs of representations of the sample in the form of the light emitted from the sample, an image sensor (7) connected to the optical system for taking photographs of representations of the sample captured by the optical system (5), a focal point displacement device (10) for displacing the focal point (F) of the optical system (5) in relation to the sample (2) between individual pictures taken, and an evaluating unit (9) for evaluating the pictures taken by the image sensor by the combination of the pictures into a 3-D model of the sample. Focal length adjusting means (12) are provided for shifting the focal point (F). Preferably, the optical system (5) has at least one liquid lens (14) with a controllable focal length (f) which can be triggered by the focal length adjusting means (12). |
