METHOD AND APPARATUS FOR MONITORING PORT BLOCKAGE FOR TDLAS MEASUREMENTS IN HARSH ENVIRONMENTS

摘要

A method of monitoring blockage of a sight tube attached to a wall of a process chamber, the sight tube being operatively associated with a TDLAS optical head with a window between the sight tube and the TDLAS optical head. The method includes the steps of providing a photo sensor in the TDLAS optical head, the photo sensor being positioned to receive light emitted by a light emitting process within the process chamber. An emission signal produced by light emitted by the light emitting process within the process chamber being received by the photo sensor is monitored. A determination is made if the emission signal is degrading.