| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma light source that stably produces extreme ultraviolet light for a long period of time.SOLUTION: A plasma light source includes: a pair of coaxial electrodes 10 and 10 that are arranged so as to face each other and that generate and confine therebetween plasma that radiates extreme ultraviolet light; and a voltage applying device 30 that applies a discharge voltage of the same polarity to each coaxial electrode 10. Each coaxial electrode 10 has: a bar-like center electrode 12 that extends on a single axis Z-Z; external electrodes 14 that are provided so to surround the outer boundary of the center electrode 12; and an insulator 16 that insulates the center electrode 12 and the external electrodes 14 from each other. |
