| 摘要 |
PROBLEM TO BE SOLVED: To enhance the data processing efficiency of correction data for suppressing variation of pattern dimension caused by a phenomenon having a small influence radius.SOLUTION: Drawing data has dose information for correcting a proximity effect to be input into a charged particle beam drawing device. A method for creating the drawing data comprises a step of inputting drawing data with a correction map which has a correction map containing dose information corresponding to a drawing area, a step of dividing the drawing area into plural sub-frames, dividing the sub-frame into plural blocks, and allocating, to each block, the divided map which is obtained by dividing the correction map, a step of filing the mesh size of the divided map contained in each block, the number of meshes and the dose information in each mesh on a sub-frame basis, and a step of outputting drawing data with a hierarchical correction map which has a hierarchical correction map having plural files corresponding to plural sub-frames.SELECTED DRAWING: Figure 9 |
