HEAT-RESISTANT COMPOSITE MATERIAL PRODUCTION METHOD AND PRODUCTION DEVICE

摘要

In the present embodiment, in the production of a heat-resistant composite material resulting from impregnating a ceramic fiber preform with silicon carbide, a mixed gas containing starting material gas, an additive gas, and a carrier gas is supplied to a substrate having a minute structure such as a preform stored in an electric furnace, silicon carbide is deposited to form a film by means of a chemical vapor deposition method or a chemical vapor infiltration method, and the film formation growth speed and embedding uniformity are controlled by means of the amount of additive gas added to the starting material gas, the starting material gas contains tetramethylsilane, and the additive gas contains a molecule containing chlorine such as methyl chloride or hydrogen chloride. The film formation growth speed and embedding uniformity of the silicon carbide are both achieved.

主权项

1. A method of producing a heat-resistant composite material using chemical vapor deposition or chemical vapor infiltration, the method comprising the steps of:
accommodating a base material in a reaction furnace; and causing precursor gas, additive gas, and carrier gas to flow in the reaction furnace to deposit silicon carbide on the base material for film formation, wherein the precursor gas includes tetramethylsilane, and the additive gas includes molecules containing chlorine.