发明名称 液体吐出ヘッドの製造方法及び露光方法
摘要 Provided is a method of manufacturing a liquid injection head, the method including: forming, on a substrate, a negative photosensitive resin layer having a first surface on a side opposite to the substrate and a second surface on the substrate side; carrying out first exposure of the negative photosensitive resin layer; carrying out second exposure of the negative photosensitive resin layer; and forming the ejection orifice by carrying out development after the first exposure and the second exposure in which each of the first surface and the second surface has a portion in which a part of the unexposed portion in the first exposure and a part of the unexposed portion in the second exposure overlap and a portion in which a part of the unexposed portion in the first exposure and a part of the unexposed portion in the second exposure do not overlap.
申请公布号 JP6008556(B2) 申请公布日期 2016.10.19
申请号 JP20120099802 申请日期 2012.04.25
申请人 キヤノン株式会社 发明人 石川 哲史;佐藤 環樹
分类号 B41J2/16 主分类号 B41J2/16
代理机构 代理人
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