| 摘要 |
A substrate processing device is provided with a casing (21) and a hollow swing arm (23) located inside the casing. The swing arm includes a hollow swing center shaft part (23a) connected to the casing and a hollow linking shaft part (23b) representing the swinging end. The substrate processing device is further provided with a processing part (22) located inside the casing and adapted to move within a processing space, which faces the substrate, in a direction orthogonal to the axial direction (P) of the swing center shaft part and process the substrate. The processing part is linked to the linking shaft part so that the linking shaft part (23b) is able to move parallel to the processing part so as to track the movement of the processing part. Therefore, the movement of the processing part (22) causes the swing arm (23) to swing. The substrate processing device is further provided with a connection line located inside the swing arm (23), connected through the interior of the swinging center shaft part (23a) to a utility located outside the casing, and connected through the interior of the linking shaft part (23b) to the processing part. |
